Handbook of Vacuum Science and Technology

Handbook of Vacuum Science and Technology

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The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. Key Features * User oriented with many useful tables, charts, and figures of use to the practitioner * Reviews new vacuum materials and equipment * Illustrates the design and maintenance of modern vacuum systems * Includes well referenced chapters2.5.7 FUTURE DEVELOPMENTS The last 5 or 10 years have brought significant improvements in cryopump speeds, capacities, and ... controllers, has already enabled pumps to perform regeneration processes that are not practical with manual controls. ... The ability to sense and control more parameters of pump operationanbsp;...


Title:Handbook of Vacuum Science and Technology
Author: Dorothy Hoffman, Bawa Singh, John H. Thomas, III
Publisher:Academic Press - 1997-10-29
ISBN-13:

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