ULSI Process Integration

ULSI Process Integration

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[2] Avanti Corp., Tsuprem4, Medici, Usera#39;s Manual, October 97, Fremont, US. [3] Muller et al., aquot;Device Electronics for integrated Circuitsaquot;, Wileyaamp;Sons, 1986 [4] S. Halania et al., Microelectronics Journal, pp. 137-158, 1995 [5] K.H. Lee et al.

Title:ULSI Process Integration
Author: Cor L. Claeys
Publisher:The Electrochemical Society - 1999-01-01

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